%0 Generic
%A Wohlfeld, Denis
%D 2009
%F heidok:10251
%K Aktive optische Kabel , Parallele Mikroskopie , Mikrooptik , Optische Verbindungstechnik, SU-8Active Optical Cable , Parallel Microscopy , Microoptics , Optical Interconnects , SU-8
%R 10.11588/heidok.00010251
%T Simulation, Analysis, and Fabrication of Miniaturized Components with Applications in Optical Interconnects and Parallel Microscopy
%U https://archiv.ub.uni-heidelberg.de/volltextserver/10251/
%X Optics and miniaturization of components are both key technologies supporting the progress in many multidisciplinary areas and enabling products with more functionality at reduced size and costs. Two applications of microscoptic integrations in the field of optical communications and parallel microscopy are investigated. This thesis also deals with light propagation in geometrical optics and scalar wave optics, both in homogeneous and inhomogeneous media.  The fabrication and optimization of integrated fiber couplers with applications in active optical cables are the first focus of the thesis. A new concept for compact fiber coupling with a pitch distance of 250 µm and an integrated 45° mirror is introduced and all steps from fabrication over replication to coupling efficiency measurements are described.  For the fabrication of miniaturized components a new method using UV deep lithography in SU-8 with multidirectional exposure for structure angles above 45° is developed. Replication technologies like direct UV replication and soft lithography using PDMS are also analyzed with respect to large-scale production of highly integrated structures.  Miniaturization is also investigated in parallel microscopy to speed up high content screens in life science. The concept of parallel microscopy is analyzed and a compact GRIN-rod lens system is developed with the capability of scanning microwell arrays with 10k spots in one scan.