%0 Generic
%A Auer, Maximilian
%D 2016
%F heidok:21440
%R 10.11588/heidok.00021440
%T Numerical treatment of localized fields in rigorous diffraction theory and its application to light absorption in structured layers
%U https://archiv.ub.uni-heidelberg.de/volltextserver/21440/
%X This work provides a contribution to the numerical problem of electromagnetic wave diffraction. For this purpose the widely used rigorous coupled-ave analysis (RCWA) is extended to an efficient treatment of incident light beyond the mere plane-wave input. This is essential for modern optical systems with laser or LED sources, which emit finite beams with various profiles. It thereby enables the rigorous analysis of focused light in structured media like in optical storage technology or in optical waveguide coupling. The new extension also dissolves the RCWA's restriction of handling purely linear polarized light sources. Due to a superior truncation scheme the new method inherently conserves energy during the modal propagation even within absorbing grating structures and despite the necessary numerical truncation.  Another part of this work addresses the exact calculation of electromagnetic near fields and local absorption. The results are used to develop a photodetector that is fully compatible with the SOI-CMOS process and does not depend on typical optically active III-V materials. This enables the direct integration of an active, optical component in the manufacturing process of conventional electronic chips and might allow the development of new cost-effective optoelectronic hybrid components in the future, which combine the benefits of both technologies.